报 告 人：Uwe Brand 教授
工作单位：Department of Surface Metrology, Physikalisch-Technische Bundesanstalt (PTB)
Currently Dr. Brand is the head of the department Surface Metrology in the Physikalisch-Technische Bundesanstalt in Braunschweig (Germany). He is also the leader of the working group “Tactile Probing Methods” and has more than fifteen years of experience in micro- and nanoforce metrology for tactile sensors. In his working group three silicon micro probes have been developed, a piezoresistive 3D-Silicon Boss probe, a piezoresistive long slender cantilever designed for fast measurements of form and roughness inside micro bore holes (injection and gas flow nozzles) and a capacitive MEMS probe. Within the German standardisation committee DIN he prepared the standard “DIN 32567 Production equipment for microsystems - Determination of the influence of materials on the optical and tactile dimensional metrology which proposes methods how to traceably measure probing force and tip radius of stylus instruments.
Stylus profilometry is the most reliable method to measure the topography of surfaces. It is limited in terms of lateral resolution and measurement time. To overcome these limitations, scanning-probe microscopes were developed to measure micro- and nanostructures with high lateral resolution. In between these two techniques, a variety of new tactile microsensors for measuring surface topography at medium heights in the sub-mm range and simultaneously mechanical surface properties have been developed during the past two decades. The contribution presents the contribution of PTB to this development showing three different tactile sensors developed: a CMM boss probe, a fast cantilever profilometer microprobe and a MEMS-SPM sensor. Special attention is paid to the traceable calibration of the sensors and the measurement uncertainty obtainable.